In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - TM106-LD Battery Electrode Fabrication (+/- 10%) with roughness: ~10

(+/- 10%) with roughness: ~10 nm RMS as measured by the Wyko (white light interferometer) for 50 umx50 um area

Resistivity:                       >50  Ohm

Vacuum gauge and valves Two vacuum flanges are included for the glove box to achieve vacuum to remove moisture and oxygen without expensive inert gas purging

Material:                                   Natural ABS With ESD Coating

This allows downloading data for further analysis

In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - TM106-LD Battery Electrode Fabrication (+/- 10%) with roughness: ~10EQ TM106 LD is a high precision thickness sensor monitor for the thin film deposition process. It is based on the principle that the mass of a deposited film on a quartz crystal can be measured by monitoring the change in crystals oscillating frequency. If the density of deposited material is known, the thickness can be determined to a high resolution of sub Angstrom (0. 037 for this equipment). SPECIFICATIONS: Power 5 VDC, 400 mA Frequency Range 6. 0