E09400 - SEMI E94 - 컨트롤 잡 관리 사양 StdTpc-FPD Masks SEMI E115-0302E (Reapproved 0816)

SEMI E115-0302E (Reapproved 0816)

the required attributes

Because of the hazardous nature of chrome containing etchants

02グレードの窒素およびアルゴンバルク供給ガスの最大許容パーティクル濃度を設定すること(2)その確認のための基準方法を記述することである。

originally published in 1984

E09400 - SEMI E94 - 컨트롤 잡 관리 사양 StdTpc-FPD Masks SEMI E115-0302E (Reapproved 0816)This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www. semiviews. org and www. semi. org in March 2014; originally published February 2000; previously published July 2013. This Specification describes equipment provided services to the factory that supports a high level of factory