Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution not-for-sale a) linear measurement method

a) linear measurement method

BS EN 15960:2011 supersedes DD CEN/TS 15960:2009

Easy-to-implement: in order to ensure a rapid uptake by stakeholders of learning

This document provides basic information to support an informed choice for one or another method for the preparation of calibration gas mixtures

and to manage stored data

Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution not-for-sale a) linear measurement method1 Scope This International Standard describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X ray photoelectron spectrometers under defined settings. The straight edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 m. The grid method is suitable if the lateral resolution is expected to be less than 1 m but more than 20 nm. The gold island method is