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Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE by testing with a single

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by testing with a single specified load applied to the stylus to assess compliance with a particular specification

Basic principles and uncertainties

Constructional requirements

g) liberated gases

13 Safety in use

Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE by testing with a singleWhat is this standard about? This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.

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