E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard StdPbc-0818 Similar processes are defined in

Similar processes are defined in ASTM E82

FPDガラス基板をある枚数収納するカセットに適用される。選択された用語，定義並びに仕様概略が含まれている。枚葉用ガラス基板カセットの仕様は他文書で記述される予定である。

000 defects per cm2

The interface specified in this Standard can be for a sealed mini-environment

The final goal of this Standard is to realize the traceability of semiconductor

E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard StdPbc-0818 Similar processes are defined inThis standard was technically approved by the global Physical Interfaces & Carriers Committee and is the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition reapproved by the North American Regional Standards Committee on August 16 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1992; last published June 1999. NOTICE: This document was