M03200 - SEMI M32 - Guide to Statistical Specifications StdTpc-Package Test Methods The scope of this Specification

The scope of this Specification includes:

SEMI PV13-0714 (Reapproved 0121)

해당 버전의 출판은 2012년 12월 20일 Global Audits and Reviews Subcommittee에 의해 승인되었다

The Test Method is for use with commercially available carbon analyzers which are based on combustion in an induction furnace principle and use infrared detector as the measuring technique

This Document references SEMI E78

M03200 - SEMI M32 - Guide to Statistical Specifications StdTpc-Package Test Methods The scope of this SpecificationThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published September 1998; previously published July 2004. Specifications are based on requirements negotiated between trading partners. This document describes an explicit specification form that defines