E01700 - SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests StdTpc-Equipment Models 1 Within the semiconductor industry

1  Within the semiconductor industry

This Guide covers the formulation

SEMI MF1529-02 (first SEMI publication)

as when pulled down onto an ideally clean flat chuck

The model specified in this Specification is used in conjunction with the Sensor/Actuator Network Common Device Model (CDM) to completely describe the VPG as it appears from the network interface

E01700 - SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests StdTpc-Equipment Models 1 Within the semiconductor industry1 Purpose 1. 1 The purpose of this Standard is to provide a test method for measurement of mass flow controller (MFC) transient characteristics. 2 Scope 2. 1 This Standard is intended to establish a common basis for communication between users and suppliers of semiconductor equipment. It provides terminology and methodology aimed at eliminating confusion regarding what previously has been referred to as MFC response time. The conditions and procedures