E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-1109 - Superseded This Document covers requirements for

This Document covers requirements for all grades of argon used in the semiconductor industry

6  This Guide also provides a measurement procedure for local bow

18-0914 (Reapproved 1125)

The source is normally a polarized laser beam in combination with a high-contrast prism polarizer

hereinafter collectively referred to as CC-Link IE

E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-1109 - Superseded This Document covers requirements forThis Standard establishes a Specific Equipment Model (SEM) for automated material handling system (AMHS) (AMHS SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of AMHS SEM equipment into an automated (e. g., semiconductor fabrication) factory. This Document