MF172300 - SEMI MF1723 - Practice for Evaluation of Polycrystalline Silicon Rods by Float-Zone Crystal Growth and Spectroscopy Revision:SEMI MF1723-02 - Superseded The purpose of this Document

The purpose of this Document is to provide a series of specifications for different grades of argon (Ar) that are used in the semiconductor industry

with granularity to the recipe step level

This Document is intended to help the semiconductor equipment supplier design equipment exhaust ventilation systems to a common set of performance criteria as well as to provide assistance to both users and suppliers in the understanding of exhaust ventilation requirements for equipment systems

originally published June 2011

and for equipment

MF172300 - SEMI MF1723 - Practice for Evaluation of Polycrystalline Silicon Rods by Float-Zone Crystal Growth and Spectroscopy Revision:SEMI MF1723-02 - Superseded The purpose of this Document#VALUE!