M05400 - SEMI M54 - Guide for Semi-Insulating (SI) GaAs Material Parameters StdPbc-1218 The purpose of this Document

The purpose of this Document is to provide guidelines for organosilicate precursors used in Low K CVD processes and to standardize testing procedures to support those requirements

There is close alignment between this Guide and common specifications used for the purchase of silicon wafers

1 Ωcm for n-type silicon with minor changes in the measurement procedure

eliminating inaccuracies due to incorrect or untimely input from the user

The purpose of this Specification is to provide sufficient detail to allow the transport module end effector to move wafers to and from process and cassette modules in a cluster tool without mechanical interference

M05400 - SEMI M54 - Guide for Semi-Insulating (SI) GaAs Material Parameters StdPbc-1218 The purpose of this Document1 Purpose 1. 1 Substrates with high electrical resistivity and electron drift mobility are needed to fabricate high performance digital and analog microelectronic devices and circuits. Semi insulating n type gallium arsenide, henceforth termed SI GaAs, has been established worldwide as a preferred substrate material for such applications. 1. 2 The active layers needed for devices are generated either by epitaxy or by ion implantation. The quality of