E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port StdTpc-Mask and Mask Equipment The Guide does not apply

The Guide does not apply to measurement systems used to control intermediate process steps during Si wafer manufacturing

Although it is recognized that the materials of construction and the adhesives used to apply the label must be selected with this use in mind

the user of this Document can generate specifications for silicon annealed wafers

orgで入手可能となる。初版は2009年11月に発行された。

2 — Guide for Writing Sensor/Actuator Network (SAN) Letter Ballots

E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port StdTpc-Mask and Mask Equipment The Guide does not apply1 Purpose 1. 1 The purpose of this Specification is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 300 mm Tape Frame FOUP can be loaded and unloaded. The intention of this Specification is to define a set of requirements and features to enable interoperability of load ports and Tape Frame FOUPs without limiting innovative solutions. 2 Scope 2. 1 The interface specification in this