G09200 - SEMI G92 - Specification for Tape Frame Cassette for 450 mm Wafer Revision:SEMI G92-0315 - Superseded This Standard covers specifications for

This Standard covers specifications for services to and events from CLJ and CFJ models

Standardization of these component interfaces will allow for interchangeability of gas distribution system components

2  This Standard specifies the application of the appropriate processing to specified material received at the processing agent

Additions to the Standard are made utilizing the SEMI Standards balloting process

SEMI D58-0310 (first published)

G09200 - SEMI G92 - Specification for Tape Frame Cassette for 450 mm Wafer Revision:SEMI G92-0315 - Superseded This Standard covers specifications forThe purpose of this Standard is to specify mechanical features for the 450 mm wafer tape frame cassette used between the wafer mounting process and the die bonding process. This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Only the mechanical interfaces for the tape frame cassette are specified. Materials kinds