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EV Ebara Technologies EV-S100P Dry Vacuum Pump VLV POS Manufacturer Refurbished img{max-width:100%} Lam Research 715-177916-307 ChamberEV Ebara Technologies EV S100P Dry Vacuum Pump VLV POS Manufacturer Refurbished Part No: EV S100P Model No: EV IPN: 500153425 VLV POS Manufacturer Refurbished This item is manufacturer refurbished. The physical condition is good, but there may be signs of previous use and handling. Sale Details Item Condition: Manufacturer Refurbished, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = TBD; Requires Freight Shipping. Shipping Terms: All