P02000 - SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン（提案） StdTpc-Photovoltaic • To define key specifications

• To define key specifications for EUV substrates that ensure physical dimensional compatibility with EUV carriers

本ドキュメントにおける計量の標準単位としては，国際単位系（SI）が使用される。U

1  This Standard is a generic specification for electro-optical and mechanical measurement methods of LED light bar used for LCDs

1  This Guide defines components of bulk chemical distribution systems (BCDS) and sets forth basic design elements and optional design features common to BCDS

SEMI E113-1101 (first published)

P02000 - SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン（提案） StdTpc-Photovoltaic • To define key specificationsNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2003428Japanese Regional Standards Committee20036www. semi. org200371992 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to