G08200 - SEMI G82 - Specification for 300 mm Load Port for Frame Cassettes in Backend Process Revision:SEMI G82-0301E (Reapproved 0706) - Superseded Dimensional measurements made with an

Dimensional measurements made with an optical microscope are made on the optical image of the specimen and not directly on the specimen itself

The Standard includes the terminologies of components used in backlight units

背景および動機

orgで入手可能となる。初版は1993年発行。

1  This Practice covers:

G08200 - SEMI G82 - Specification for 300 mm Load Port for Frame Cassettes in Backend Process Revision:SEMI G82-0301E (Reapproved 0706) - Superseded Dimensional measurements made with anThis Specification defines dimensional requirements for the load port of frame cassette for 300 mm wafer in backend process equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate the use of automated frame cassette transport systems, and or to meet ergonomic requirements for manually loaded equipment. This is a Standard covering equipment for 300 mm frame cassette only. Referenced SEMI