F09900 - SEMI F99 - Dimensional Specification of a Diaphragm Valve for a Metric PFA Tube Revision:SEMI F99-0705 - Inactive SEMI G69-0996 (first published)

SEMI G69-0996 (first published)

SEMI MF1810-1110 (Reapproved 0222)

SEMI M53-0216 (technical revision)

This Document defines the method of FPD glass substrate surface roughness measurement by stylus method surface roughness measurement instrument

Requirements for EPT compliance

F09900 - SEMI F99 - Dimensional Specification of a Diaphragm Valve for a Metric PFA Tube Revision:SEMI F99-0705 - Inactive SEMI G69-0996 (first published)This specification was technically approved by the Global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 11, 2005. It was available at www. semi. org in June 2005. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to