E13000 - SEMI E130 - 300mm環境のプローバ専用装置モデル（PSEM300）に関する仕様 StdTpc-FPD Color Filters This document covers the measurement

This document covers the measurement of FPD glass substrate surface waviness by measuring instruments employing mechanical stylus

酸素析出物も絶縁破壊耐圧劣化の原因となるが ，購入直後のウェーハでは，通常酸素析出物はほとんど含まれておらず，GOIへの影響はほとんど無い。従って，本スタンダードでの議論の対象としない。

Originally published in 1986

각각의 재료 유형에 따라 프로세싱이 명시되어야만 한다

Some of the available techniques for measuring impurities are shown in § 7

E13000 - SEMI E130 - 300mm環境のプローバ専用装置モデル（PSEM300）に関する仕様 StdTpc-FPD Color Filters This document covers the measurementglobal Information & Control Committee2010430Global Audits and Reviews Subcommittee20106www. semi. org200311200411 300mmPSEM300PSEM300 Subordinate Document: SEMI E130. 1 1104 (Reapproved 0710) 300mmPSEM300SECS II Referenced SEMI Standards SEMI E5 SEMI Equipment Communication Standard 2 Message Content (SECS II) SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E37 High Speed SECS Message Services (HSMS)