E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) Revision:SEMI E189-0524 - Superseded SEMI E148-1109 (Reapproved 0614)

SEMI E148-1109 (Reapproved 0614)

This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18

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SEMI E123 — Specification for Handler Equipment Specific Equipment Model (HSEM)

Traceability Requirements

E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) Revision:SEMI E189-0524 - Superseded SEMI E148-1109 (Reapproved 0614)E This Standard was editorially modified to correct a publication error. A correction was made to Figure 1. This Specification provides a standardized behavior for host communication with manufacturing equipment during the removal, installation and usage of consumables and durables. This Specification defines objects and state models that define the interaction between the host and equipment in the following scenarios: Durable removal, installation,