M07100 - SEMI M71 - CMOS LSI用シリコン・オン・インシュレーター（SOI）ウェーハのための仕様 StdTpc-Stainless Steel Components SEMI A1-1020 (technical revision)

SEMI A1-1020 (technical revision)

SEMI E84-1107 (technical revision)

Because the zero point on the z-axis is application specific

nonflammable

SEMI M54-0924 (technical revision)

M07100 - SEMI M71 - CMOS LSI用シリコン・オン・インシュレーター（SOI）ウェーハのための仕様 StdTpc-Stainless Steel Components SEMI A1-1020 (technical revision)global Silicon Wafer Committee2010120global Audits and Reviews Subcommittee20102www. semi. org200711 CMOSLSI large scale integrated circuitSOI silicon on insulator130nm65nm45nmLSI200mm300mm150mmLSI Referenced SEMI Standards SEMI M1 Specifications for Polished Single Crystal Silicon Wafers SEMI M20 Practice for Establishing a Wafer Coordinate System SEMI M35 Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated