E08400 - SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface StdPbc-0816 SEMI C3 — Specifications for

SEMI C3 — Specifications for Gases

This Standard describes a specific device structure and behavior of a generic equipment networked sensor

SEMI MF1569-94 (Reapproved 1999) (first SEMI publication)

and flatness

and materials acceptance purposes

E08400 - SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface StdPbc-0816 SEMI C3 — Specifications forDue to the migration to large wafer sizes, future semiconductor factories will use extensive automated material handling systems (AMHS) to transfer wafer carriers, including FOUPs and open cassettes, of increasing weight. The parallel input output (PI O) control signals between the production equipment and the AMHS must be better defined for more reliable and efficient carrier handoffs (load unload) at production equipment load ports. The purpose of