G05200 - SEMI G52 - 半導体リードフレームのイオン汚染物の測定のための標準測定法（提案） Revision:SEMI G52-90 (Reapproved 1104) - Superseded This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12

This Guide contains definitions of terms and procedures for determining the leak rates of MFCs as used in the semiconductor industry

the position of the substrate

SEMI MF154-1105 (technical revision)

The glass substrate is intended to remain permanently in the package or device

G05200 - SEMI G52 - 半導体リードフレームのイオン汚染物の測定のための標準測定法（提案） Revision:SEMI G52-90 (Reapproved 1104) - Superseded This edition was approved forGlobal Assembly and Packaging CommitteeJapanese Packaging Committee2004723Japanese Regional Standards Committee20049www. semi. org2004111990 Na+NH4+K+Cl NO3 Br SO42 PO43 Referenced SEMI Standards None.