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M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 StdVol-Safety Guidelines To determine the impurity capacity

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To determine the impurity capacity of a gas purifier at the point of breakthrough

For the purpose of this test HCl is the preferred test gas

for both front opening shipping box (FOSB) labels and bag labels

interfaces

H and noble gases due to high background signals) in silicon feedstock using a magnetic sector high-mass resolution glow discharge mass spectrometry (HR-GDMS)

M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 StdVol-Safety Guidelines To determine the impurity capacityGaAs Referenced SEMI Standards None.

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