S02800 - SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment StdPbc-1118 SEMI T10-0701 (first published)

SEMI T10-0701 (first published)

gyroscopes

such as wafer carriers and wands

－ 本スタンダードは，半導体工場での自動材料搬送，すなわち，あるプロセス工程や保管場所から他へ，材料および他のものを搬送するという課題について記述する。これは材料搬送の概念，材料搬送に関する（搬送装置も含めた）装置の挙動，および課題を遂行するために必要とされるメッセージサービスについて明らかにしている。

評価会社の資質

S02800 - SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment StdPbc-1118 SEMI T10-0701 (first published)This Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in October 2011. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety