E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) StdPbc-0324 a specification of content shall

a specification of content shall be expressed as a numerical limit in units of mole per mole (mole/mole)

This Test Method is an adaptation of ASTM G150

SEMI E30-1103E (editorial revision)

This Practice reveals strain fields arising from the presence of precipitates

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E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) StdPbc-0324 a specification of content shallThis Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications