G07900 - SEMI G79 - Specification for Overall Digital Timing Accuracy Revision:SEMI G79-0200 - Inactive この狭ピッチの容量25枚のFOBITは，SEMI E62で規定されている13枚ウェーハのFIMSインタフェースで使用されるように設計される。

この狭ピッチの容量25枚のFOBITは，SEMI E62で規定されている13枚ウェーハのFIMSインタフェースで使用されるように設計される。

A brief description of the theory of this Test Method is given in Related Information 1

as technology advances to smaller and smaller dimensions for the elements of high density integrated circuits

The purpose of this Document is to provide guidelines for organosilicate precursors used in Low K CVD processes and to standardize testing procedures to support those requirements

SEMI E83-0714 (technical revision)

G07900 - SEMI G79 - Specification for Overall Digital Timing Accuracy Revision:SEMI G79-0200 - Inactive この狭ピッチの容量25枚のFOBITは，SEMI E62で規定されている13枚ウェーハのFIMSインタフェースで使用されるように設計される。This Standard was technically approved by the global Automated Test Equipment Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in May 2012; originally published February 2000. This Standard is intended to provide a minimum common definition of timing accuracy specifications for semiconductor automatic test equipment