G09100 - SEMI G91 - Standard Test Data Format (STDF) Memory Fail Datalog StdPbc-0814 本仕様は，6

本仕様は，6

Fab Construction Monitor and the Fab Equipment Monitor

16-1106 (Reapproved 1211)

SEMI C36-1106 (technical revision)

It is a guide for establishing electrostatic compatibility in facilities used for semiconductor manufacturing

G09100 - SEMI G91 - Standard Test Data Format (STDF) Memory Fail Datalog StdPbc-0814 本仕様は，6NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Standard is to provide a common format for memory fail datalog specification along with necessary synchronization information enabling an efficient dataflow for volume diagnostics applications for