TEL Tokyo Electron 300mm CPL Chilling Hot Plate Process Station Lithius Working Model No: SR-MINI I/F BOX

Model No: SR-MINI I/F BOX Installed Components

Part No: CB700S-1-20

Made in the USA This Genus 41874-00 Remote CPU PCB is used working surplus

Millipore CWUZ 01P 01 Microgard UPX 10" Filter 0

35-2-316LP-ALC Diaphragm Valve Mattson 493-16031-00 New

TEL Tokyo Electron 300mm CPL Chilling Hot Plate Process Station Lithius Working Model No: SR-MINI I/F BOXTEL Tokyo Electron 300mm CPL Chilling Hot Plate Process Station Lithius Working Model No: CPL Chilling Hot Plate Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Installed Components Komatsu Part No: 20001870, RCC 300 Omron Part No: E3X DA11 N (Qty. 2) TEL PCB Part No: HTE MC1 B 12, TMB2001, BOARD,CONN HPI #01 Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5087