E02200 - SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume StdTpc-Terminology SEMI D63-0818 (technical revision)

SEMI D63-0818 (technical revision)

originally published June 2013

To help the communication between component/material/IC and panel manufactures

This also complicated the variety of shapes and colors for markers

NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met

E02200 - SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume StdTpc-Terminology SEMI D63-0818 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to provide sufficient detail to allow the transport module end effector to move wafers to and from process and cassette modules in a cluster tool without mechanical interference. This