E09600 - SEMI E96 - Guide for CIM Framework Technical Architecture Revision:SEMI E96-1101 - Superseded The Guides may also be

The Guides may also be used to establish process control criteria for the incoming feedwater

and inspection information obtained by devices such as wafer inspection equipment and review tools

Equipment intended for further productive use includes that being offered for reuse

SEMI MF1630-00 (first SEMI publication)

SEMI F48-0200 (first published)

E09600 - SEMI E96 - Guide for CIM Framework Technical Architecture Revision:SEMI E96-1101 - Superseded The Guides may also beNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Guide describes technical architecture choices that enable application components to cooperate in a computer integrated manufacturing (CIM) environment and reduce the effort required to integrate those components into