S01800 - SEMI S18 - 可燃性シリコン化合物の環境，健康，安全に関するガイドライン StdPbc-0823 This Specification defines the geometric

This Specification defines the geometric and spatial limits of the alphanumeric code

the user of this Document can generate specifications for silicon annealed wafers

The order of the data items may be restricted by an application document

1-1107 (technical revision)

this Test Method provides a procedure for testing the outgassing of organic compounds in a complete minienvironment

S01800 - SEMI S18 - 可燃性シリコン化合物の環境，健康，安全に関するガイドライン StdPbc-0823 This Specification defines the geometricglobal Environmental Health & Safety Technical Committee20111224global Audits and Reviews Subcommittee20123www. semiviews. org www. semi. org200211 : 2011 FPDPV 1 Referenced SEMI Standards SEMI F1 Specification for Leak Integrity of High Purity Gas Piping Systems and Components SEMI F5 Guide for Gaseous Effluent Handling SEMI F6 Guide for Secondary Containment of Hazardous Gas Piping Systems SEMI S1 Safety Guideline for Equipment Safety Labels SEMI S2