E02800 - SEMI E28 - マスフローコントローラの圧力仕様のガイドライン StdTpc-300 mm Carriers & Physical Interfaces The format and algorithms of

The format and algorithms of this code are based on two-dimensional symbology specified in ISO/IEC 16022

released from semiconductor manufacturing operations

Especially non-rectangle shapes are effective

SEMI E78-0912 (technical revision)

SEMI E54-1296 (technical revision)

E02800 - SEMI E28 - マスフローコントローラの圧力仕様のガイドライン StdTpc-300 mm Carriers & Physical Interfaces The format and algorithms ofglobal Gases Committee2010430global Audits and Reviews Subcommittee20106www. semi. org1992200411 Referenced SEMI Standards SEMI E12 Standard for Standard Pressure and Standard Temperature for Flow Units Used in Mass Flow Meters and Mass Flow Controllers