P00100 - SEMI P1 - Specification for Hard Surface Photomask Substrates Revision:SEMI P1-0708E - Inactive orgで入手可能になり。初版は1993年発行。前版は1994年発行。

orgで入手可能になり。初版は1993年発行。前版は1994年発行。

For certain applications

This Document also provides a guide for a grade of hexamethyldisilazane for which a need has been identified

the types of liquid chemicals listed below:

SEMI F41 — Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing

P00100 - SEMI P1 - Specification for Hard Surface Photomask Substrates Revision:SEMI P1-0708E - Inactive orgで入手可能になり。初版は1993年発行。前版は1994年発行。NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This Document was completely rewritten in 2008. This Specification covers the general requirements of the glass substrate for hard surface photomasks. This Document covers square photomasks up to 7 inches in length.