E12000 - SEMI E120 - COMMON EQUIPMENT MODEL 사양 Revision:SEMI E120-0414 - Superseded SEMI E111-1104 (technical revision)

SEMI E111-1104 (technical revision)

2 dichloroethylene for which a need has been identified

This Standard covers requirements for disilane (Si2H6) used in the semiconductor industry

Intended Audience — This Standard is intended for use by OEMs

and/or to meet ergonomic requirements for manually loaded equipment

E12000 - SEMI E120 - COMMON EQUIPMENT MODEL 사양 Revision:SEMI E120-0414 - Superseded SEMI E111-1104 (technical revision)This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www. semiviews. org and www. semi. org in April 2014; originally published March 2003; previously published March 2010. The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment