SVG 28-543013-01-001 9038S/9037S Bake & Chill Station 28-43015-01 9044S 90S img{max-width:100%} Hitachi Chamber Feed-through M-712E

img{max-width:100%} Hitachi Chamber Feed-through M-712E Shallow Trench Etcher System Untested As-Is

Part No: 54-123388A45-R Model No:

5080-193793-11: PCB

Removed from a KLA-Tencor eS31 E-Beam Wafer Inspection System Included Components

Estimated Packed Shipping Dimensions: L x W x H = 30" x 16" x 18" @ 18 lbs

SVG 28-543013-01-001 9038S/9037S Bake & Chill Station 28-43015-01 9044S 90S img{max-width:100%} Hitachi Chamber Feed-through M-712ESVG 28 543013 01 001 9038S 9037S Bake & Chill Station 28 43015 01 9044S 90S Working This item is untested surplus and is being sold as is. The physical condition is good, but there are signs of previous use and handling. Part No: Vacuum Bake and Chill Plate Station Removed from a ASML SVG Silicon Valley Group 90S DUV System Installed Wafer Stations Vacuum Bake Part No: 28 543013 01 001 Model No: 9038S 9037S Rev. 0 Vacuum Bake Part No: 28 43015 01