E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded The mask size specifies range

The mask size specifies range from 330 × 450 mm to 1220 × 1400 mm

本文書の範囲は半導体産業で使用されるトランス1，2ジクロロエチレンの提案された不純物限度の一覧作成である。

2  Final assemblies should be evaluated according to the criteria of SEMI S2 for environmental

This Standard specifies measurement conditions and methods for describing the visual color quality in three-dimensional (3D) color space

1  This Standard contains terminology and reference documents used in SEMI E49

E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded The mask size specifies rangeThe purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC. This procedure describes a method to determine the MFC conversion factor and function between two gases. This Standard provides a common basis for communication between manufacturers and users. The intent of this Standard is not to suggest any