E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded This Standard defines a model

This Standard defines a model which represents logistics management of a carrier in equipment as Carrier Logistics Job (CLJ)

SEMI E125 — Specification for Equipment Self-Description (EqSD)

The scope of this Standard is to define WJOBJ which represents WJ

本スタンダードは，直径450　mmのウェーハおよびクラスターツールモジュールの間のインタフェースにのみ適用される。例外として搬送モジュールは，インタフェース面を越えて操作されるがゆえにプロセスモジュール内のウェーハ搬送面の定義が必要となる。

a basic set of common services (operations) between the FMCS and the FPUs are specified to exchange FPU status information and data

E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded This Standard defines a modelThe purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions