F05800 - SEMI F58 - 大気圧イオン化質量分析計（APIMS）による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法 StdTpc-Jig ID SEMI MF951-0305 (Reapproved 0316)

SEMI MF951-0305 (Reapproved 0316)

This Specification defines a mechanical standard for the stationary (equipment) side of the docking flange used by PGVs

1  The purpose of this Standard is to standardize requirements for hydrofluoric acid used in the semiconductor industry and testing procedures to support those standards

This Guide is applicable to any type of equipment for processing semiconductor units

development

F05800 - SEMI F58 - 大気圧イオン化質量分析計（APIMS）による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法 StdTpc-Jig ID SEMI MF951-0305 (Reapproved 0316)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Gases Committee2008513global Audits and Reviews Subcommittee20086www. semi. org NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive