TEL Tokyo Electron ADH Adhesion Process Station TEL Lithius 300mm Working Spare Inventory # G2013

Inventory # G2013

Thermo Noran 700P135927 Rev E controller

Sput # 2/3 Cu Shield Kit (6")

img{max-width:100%} Nikon 4S019-154 Processor Control PCB Card BLDRVX4B NSR-S307E DUV Scanning Spare

Part No: N08001-4164-000-04

TEL Tokyo Electron ADH Adhesion Process Station TEL Lithius 300mm Working Spare Inventory # G2013TEL Tokyo Electron ADH Adhesion Process Station TEL Lithius 300mm Working Spare Part No: ADH Adhesion Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5087 401692 19 BASE(HP) ASSY,BACK 5010 101312 12 FRAME (Qty. 1) 5003 300048 11 BRACKET(R) (Qty. 1) 5010 405342 11 PLATE (Qty. 1) 5003 300047 11 BRACKET(L) (Qty. 1) 5010