P03500 - SEMI P35 - Terminology for Microlithography Metrology StdVol-Flat Panel Display pressure sensors

pressure sensors

本書は，製品の寿命が尽きた際の半導体製造装置 (SME) またはそのコンポーネントの環境への影響を最小限にするための設計上の指針となるものである。

SEMI M1-0611 (technical revision)

Wherever this Document makes reference to reticles

construction spending

P03500 - SEMI P35 - Terminology for Microlithography Metrology StdVol-Flat Panel Display pressure sensorsThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www. semiviews. org and www. semi. org in September 2013. Originally published February 2000; previously published November 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status