E15800 - SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling StdPbc-0224 4 This Specification defines a

4  This Specification defines a way for users to make ad hoc

tetrakis(dimethylamino) zirconium

SEMI E117-1102 (first published)

SEMI C35 — Specification and Guide for Nitric Acid

本スタンダードは，フラットパネルディスプレイ製品の再生産性およびすべてのベンダーが出荷するガラス基板の均一性を確保するために，ガラス基板に関する一定レベルの仕様を設けることを目的とする。また，本スタンダードにより，搬送装置およびカセット，製造装置内部のすべての機械的インタフェースの互換性も確保される。

E15800 - SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling StdPbc-0224 4 This Specification defines aThe purpose of this Document is to establish basic physical dimensions for the carriers intended to be used to transport and store 450 mm wafers, as specified by SEMI M74, within semiconductor device manufacturing facilities. This Document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers. This Document is intended to define a set of requirements to ensure