F10600 - SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector Revision:SEMI F106-0308 - Superseded and research and development

and research and development

本ガイドでは，シリコンウェーハの仕様書の発注情報の項を作成する方法に関する情報を提供する。

and example values necessary to build a comprehensive

This determination is not included in the main part of the Test Method

and the specified orientation of the flat in the plane of the wafer surface

F10600 - SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector Revision:SEMI F106-0308 - Superseded and research and developmentThis Standard was technically approved by the global Facilities Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2008. This Document defines the inboard helium leak test method for gas delivery systems. It covers both conventional metal face sealing and surface mount gas