M08700 - SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors Revision:SEMI M87-0422 - Current surface metals such as iron

surface metals such as iron

SEMI MF1529-02 (first SEMI publication)

The purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard

Wafers must be accurately aligned in various processing equipment during integrated circuit manufacture

SEMI D71-0823 (technical revision)

M08700 - SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors Revision:SEMI M87-0422 - Current surface metals such as ironThe purpose of this Test Method is to specify methods for the contactless measurement of the resistivity of semi insulating samples and wafers. This Test Method covers the determination of the electrical resistivity of semi insulating semiconductors, including GaAs, InP, CdTe, Cd(Zn)Te, SiC, GaN, and AlN, within the resistivity range 1E5 to 1E12 cm. It may also be used to characterize other materials exhibiting resistivity in this range, including in