D01300 - SEMI D13 - FPD用カラーフィルタの用語 StdPbc-0919 provide a map between EFEM

provide a map between EFEM functional elements and existing standards

SEMI PV59-0115 (first published)

2% (1 × 1020 atoms/cm3) for oxygen

The nominal volume of the canister which is over 40 liters is exempted from the scope

本スタンダードは，global Silicon Wafer Committeeで技術的に承認されている。現版は2008年8月29日，global Audits and Reviews Subcommitteeにて発行が承認された。2008年10月にwww

D01300 - SEMI D13 - FPD用カラーフィルタの用語 StdPbc-0919 provide a map between EFEMglobal Flat Panel Display Color Filters & Optical Elements Committee2008513global Audits and Reviews Subcommittee20086www. semi. org20087CD ROM1995200111 FPDCFCF Referenced SEMI Standards SEMI D3 Quality Area Specification for Flat Panel Display Substrates SEMI D20 Terminology for FPD Mask Defect SEMI D21 Terminology for FPD Mask Pattern Accuracy SEMI M21 Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array