M07600 - SEMI M76 - Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers Revision:SEMI M76-0710 - Inactive 本目的の達成のため備える必要のある，主たる要素が6つある:

本目的の達成のため備える必要のある，主たる要素が6つある:

SEMI F86 — Specification for Dimension of Two Port Components (Except MFC/MFM) for 1

SEMI C30 — Specifications and Guidelines for Hydrogen Peroxide

and accuracy)

この文書は，最小可測粒径が30nmから100nmの範囲にある液中パーティクルカウンタの計数効率を求めるための試験手順を提供する。

M07600 - SEMI M76 - Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers Revision:SEMI M76-0710 - Inactive 本目的の達成のため備える必要のある，主たる要素が6つある:This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www. semi. org in June 2010. The developmental wafers covered by this specification are intended for use in research and development of process and metrology equipment and fabrication processes required for manufacturing high density integrated