US$ 14.99
G03200 - SEMI G32 - カプセルなし熱抵抗測定用チップのガイドライン StdTpc-Photolithography Metrology including FOUPs and open cassettes
$180.00
Description
including FOUPs and open cassettes
35-1109E (editorial revision)
They must implement environmental
1-1104 (technical revision)
SEMI 3D20-0719 (first published)
G03200 - SEMI G32 - カプセルなし熱抵抗測定用チップのガイドライン StdTpc-Photolithography Metrology including FOUPs and open cassettesglobal Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org1994 : 1 ! VLSI 3. 2 Referenced SEMI Standards None.
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