MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems StdTpc-Scanning Surface Inspection Systems SEMI P21 — Guidelines for

SEMI P21 — Guidelines for Precision and Accuracy Expression for Mask Writing Equipment

reticle inspection

SEMI E28 — Guideline for Pressure Specifications of the Mass Flow Controller

509 defines has some ambiguity

orgで入手可能になり，2003年7月発行に至る。初版は1992年発行。

MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems StdTpc-Scanning Surface Inspection Systems SEMI P21 — Guidelines forThis standard was technically approved by the global MEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 20, 2007. It was available at www. semi. org in February 2008. This document provides guidelines for general fluidic interface design and materials selection that can reduce redundant engineering effort and lead to improved design, manufacturability, and operation. Referenced SEMI