MF198200 - SEMI MF1982 - Test Method for Analyzing Organic Contaminants on Silicon Wafer Surfaces by Thermal Desorption Gas Chromatography Revision:SEMI MF1982-0714 - Superseded This Document applies only to

This Document applies only to substrate map data items

So a conventional particle removal test method for particle filters is not suitable to evaluate EFFU particle removal performance

SEMI C27-0301 (technical revision)

表面処理と表面清浄装置

This Document references SEMI E78

MF198200 - SEMI MF1982 - Test Method for Analyzing Organic Contaminants on Silicon Wafer Surfaces by Thermal Desorption Gas Chromatography Revision:SEMI MF1982-0714 - Superseded This Document applies only toOrganics are present in many materials, such as plastics, lubricants, cleansers, soaps, and living tissues. Some of these compounds are volatile and others can become airborne through chemical reactions, heating, abrasion, or outgassing. Organic compounds are present in many materials such as parts and components for cleanrooms, carriers, FOUP, developers, and organic removers. Some of these organic compounds are volatile and some can be discharged