E09500 - SEMI E95 - Specification for Human Interface for Semiconductor Manufacturing Equipment Revision:SEMI E95-1101 (Reapproved 0307) - Inactive SEMI M16-1296 (technical revision)

SEMI M16-1296 (technical revision)

In more critical processes

5-0302 (Reapproved 0423)

This Guide is applicable to any type of equipment for processing semiconductor units

org February 2004

E09500 - SEMI E95 - Specification for Human Interface for Semiconductor Manufacturing Equipment Revision:SEMI E95-1101 (Reapproved 0307) - Inactive SEMI M16-1296 (technical revision)This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published February 2000; previously published November 2001. This standard addresses the area of processing content with the direct intention of developing common software standards, so that