E14300 - SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle StdVol-Silicon Materials & Process Control and repair the equipment

and repair the equipment

本書内で参照されている浸出テストとこれに関連する要求条件は，静的な状態での数値を提供する。

This Standard was technically approved by the Flat Panel Display – Color Global Technical Committee

メッセージ交換は，トランザクションプロトコルと呼ばれる手順により実行される。SECS-IIを採用する装置に対しては，このトランザクションプロトコル上からの最小限の要求がある。

SEMI E35-1022 (technical revision)

E14300 - SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle StdVol-Silicon Materials & Process Control and repair the equipmentThe purpose of this Test Method is to provide an accurate method for measuring the output power and spectral content of radio frequency (RF) generators being driven into both matched and mismatched loads to simulate their actual performance in RF power delivery systems for semiconductor processing equipment to support SEMI E113. This Test Method specifies the testing procedures and test equipment required for precisely determining the output power and